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Reference Material (RM) 8820 is primarily intended to be used for X and Y scale (or magnification) calibrations from less than 10 times magnifications to more than 100 000 times magnifications in scanning electron microscopes (SEMs). It was designed to provide good contrast at low and high electron landing energies (accelerating voltages). Beyond testing scale calibration, it can be used for non-linearity measurements, especially at lower than 10 000 times magnifications. It can also be used for optical and scanning probe and other types of microscopes. Most SEMs require a set of calibration structures of different sizes to cover the full range of possible magnifications. This Reference Material (in part using the ideas implemented in earlier NIST scale calibration artifacts) is designed to meet that need. A unit of NIST-RM 8820 consists of a 20 mm × 20 mm lithographically patterned silicon chip.



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National Institute of Standards and Technology

NIST provides over 1300 Standard Reference Materials® as well as articles and practice guides describing the development, analysis and use of SRMs.

NIST Standard Reference Materials are used by analytical laboratories in industry, academia and government in order to facilitate commerce and trade and to advance research and development. The SRMs are produced by the engineering laboratory, the material measurement laboratory, and the physical measurement laboratory at NIST. They are available for chemical composition, physical properties, and engineering materials.