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Description
This Standard Reference Material (SRM®) is intended for use in calibrating secondary ion response to minor and trace levels of phosphorus in a silicon matrix by the analytical technique of secondary ion mass spectrometry (SIMS). NIST-2133 is intended for calibrating the response of a SIMS instrument for phosphorus in a silicon matrix under a specific set of instrumental conditions. It may also be used by a laboratory as a transfer standard for the calibration of working standards of phosphorus in silicon. This SRM consists of a 1 cm × 1 cm single crystal silicon substrate that has been ion-implanted with the isotope 31 P at a nominal energy of 100 keV. /// Sample value(s) - please ask for current certificate.
Contents
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Certificate of Analysis (specimen)
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Product data sheet
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NIST provides over 1300 Standard Reference Materials® as well as articles and practice guides describing the development, analysis and use of SRMs.
NIST Standard Reference Materials are used by analytical laboratories in industry, academia and government in order to facilitate commerce and trade and to advance research and development. The SRMs are produced by the engineering laboratory, the material measurement laboratory, and the physical measurement laboratory at NIST. They are available for chemical composition, physical properties, and engineering materials.