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Beschreibung

This Standard Reference Material (SRM®) is intended for use in calibrating secondary ion response to minor and trace levels of arsenic in a silicon matrix by the analytical technique of secondary ion mass spectrometry (SIMS). NIST-2134 is intended for calibrating the response of a SIMS instrument for arsenic in a silicon matrix under a specific set of instrumental conditions. It may also be used by a laboratory as a transfer standard for the calibration of working standards of arsenic in silicon. A unit of NIST-2134 consists of a 1 cm × 1 cm single crystal silicon substrate that has been ion implanted with the isotope 75As at a nominal energy of 100 keV. NIST-2134 is certified for the retained dose of 75As atoms. The dose is expressed in units of arsenic mass per unit area. Additional noncertified information about the concentration of arsenic atoms as a function of depth below the surface is provided by SIMS. /// Sample value(s) - please ask for current certificate.